Numerical characterization of dual radio frequency micro-discharges

Electrical characterization of radio frequency discharges

Two electrical techniques that are frequently used to characterize radio frequency plasmas are described: current–voltage probes for plasma power input and compensated Langmuir probes for electron energy probability functions and other parameters. The following examples of the use of these techniques, sometimes in conjunction with other diagnostic methods, are presented: plasma source standardi...

Breakdown behavior in radio-frequency argon discharges

Electron current extraction from radio frequency excited micro-dielectric barrier discharges

Micro dielectric barrier discharges (mDBDs) consist of micro-plasma devices (10–100 lm diameter) in which the electrodes are fully or partially covered by dielectrics, and often operate at atmospheric pressure driven with radio frequency (rf) waveforms. In certain applications, it may be desirable to extract electron current out of the mDBD plasma, which necessitates a third electrode. As a res...

Capacitively-coupled radio-frequency hydrogen discharges: the role of kinetics

This paper presents a systematic characterization of capacitively-coupled radio-frequency hydrogen discharges, produced within a parallel plate cylindrical setup at different rf applied voltages (Vrf = 50− 600 V), frequencies (f = 13.56− 40.56 MHz), and pressures (p = 0.2− 1 torr). A twodimensional, time-dependent fluid model for charged particle transport is self-consistently solved coupled to...

Micro Power Radio Frequency Oscillator Design